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FT
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Rarefied clearance gas flows in vacuum pumps
Navier–Stokes equations apply for continuous flows (Kn < 0,01), they are not valid for rarefied gas flows. If the Knudsen number lies between 0.01 and 0.1, one speaks of the slip region of the flow and a velocity [...] velocity slip and a temperature jump occurs in normal direction of the walls. For Knudsen numbers 0.1 < Kn < 10 the number of intermolecular collisions and wall interactions are almost the same. In this …
